SF6 GAS

high-purity sf6 gas 1.Grade:99.99%-99.999% 2. usage:Electronics equipment,transformer,refrigerating fluid the

high-purity sf6 gas

Sulfur Hexafluoride  (SF6)

It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and arcing characteristics.

With excellent electric in sulating and arc-quenching  capacity,SF6 has been widely used in the fields of power installations,laser,medicine,meteorology,refrigeration,fire-fighting,chenical industry,military engineering,aerospace,nonferrous metallurgy and physical research etc.

Electronic SF6 is widely used in TFT-LCD,semiconductor and solar photoelectricity industy ect.

It is a good cleaning gas and etching gas for plasma process.

---------------------------------------------PURITY                                      99.99%                  99.999%     Nitrogen                                     < 20 ppm               < 5 ppmOxygen                                     < 10 ppm                < 3 ppmTotal Hydrocarbons (as CH4) < 5 ppm                 < 1 ppmHalocaron 14                           < 60 ppm                < 5 ppmWater                                        < 5 ppm                 < 3 ppmHydrogen Fluoride                  < 0.1 ppm               < 0.1 ppm

SF6 GAS